JPH044353Y2 - - Google Patents

Info

Publication number
JPH044353Y2
JPH044353Y2 JP1986023046U JP2304686U JPH044353Y2 JP H044353 Y2 JPH044353 Y2 JP H044353Y2 JP 1986023046 U JP1986023046 U JP 1986023046U JP 2304686 U JP2304686 U JP 2304686U JP H044353 Y2 JPH044353 Y2 JP H044353Y2
Authority
JP
Japan
Prior art keywords
chamber
gas
ion
gas introduction
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986023046U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62135349U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986023046U priority Critical patent/JPH044353Y2/ja
Publication of JPS62135349U publication Critical patent/JPS62135349U/ja
Application granted granted Critical
Publication of JPH044353Y2 publication Critical patent/JPH044353Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Electron Tubes For Measurement (AREA)
JP1986023046U 1986-02-20 1986-02-20 Expired JPH044353Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986023046U JPH044353Y2 (en]) 1986-02-20 1986-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986023046U JPH044353Y2 (en]) 1986-02-20 1986-02-20

Publications (2)

Publication Number Publication Date
JPS62135349U JPS62135349U (en]) 1987-08-26
JPH044353Y2 true JPH044353Y2 (en]) 1992-02-07

Family

ID=30820998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986023046U Expired JPH044353Y2 (en]) 1986-02-20 1986-02-20

Country Status (1)

Country Link
JP (1) JPH044353Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6123257U (ja) * 1984-07-17 1986-02-12 日本電子株式会社 質量分析装置等用イオン源

Also Published As

Publication number Publication date
JPS62135349U (en]) 1987-08-26

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